1 MOE Key Laboratory of Advanced Micro-Structured Materials, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
2 School of Optoelectronic Engineering, Guangdong Polytechnic Normal University, Guangzhou 510665, China
3 Shanghai Key Laboratory of Special Artificial Microstructure Materials and Technology, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
4 Department of Electrical Engineering, Tongji University, Shanghai 201804, China
5 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
6 e-mail: yufeiwang@semi.ac.cn
7 e-mail: yongsun@tongji.edu.cn